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DeviceNet 总线在半导体设备中应用

The DeviceNet bus is used in semiconductor devices

Advance in Modern Physics / 2020,2(1): 9-14 / 2020-04-26 2509 4060

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• Authors: 郭杨 朱四海*
• Information:

  吉林大学，长春

• Keywords:
  Devicenet; Semiconductor
  Devicenet; 半导体
• Abstract: Through the introduction of Devicenet bus structure, driver and performance, the application of Devicenet bus in semiconductor equipment is presented. Devicenet bus not only has the characteristics of open, efficient, low cost, strong anti-interference ability, high measurement and control accuracy, but also low cost. 通过对 Devicenet 总线的结构，驱动程序及性能方面的介绍，提出了 Devicenet 总线在半导体设备中的应用。Devicenet 总线不仅具有开放、高效、低 价、抗干扰能力强、测量及控制精度高等特点，而且成本也比较低 。
• DOI: https://doi.org/10.35534/amp.0201002c
• Cite: 郭杨，朱四海．DeviceNet 总线在半导体设备中应用［J］．现代物理进展，2020，2（1）：9-14．