国际中文开源期刊平台

膜片式环形压电振子尺寸匹配特性研究

The Study of the Size Matching Characteristics for Diaphragm Ring Piezoelectric Oscillator

机械研究 / 2019,1(1)：20-38 / 2019-09-05 6560 9459

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• 作者： 田晓超¹*      闻人锴琦¹      徐安俊¹      张代治¹      沈燕虎²     
• 单位：

  1.长春大学机械与车辆工程学院, 长春；
  2.吉林大学生物与农业工程学院，长春

• 关键词： 压电驱动；压电振子；瑞利能量法；弹性力学；共振
• Piezoelectric drive; Piezoelectric oscillator; Rayleigh energy method; Elasticity; Resonance
• 摘要： 针对膜片式环形压电振子结构尺寸匹配问题，本文采用瑞利能量法和弹性力学方法对膜片式环形压电振子进行理论分析。以压电陶瓷晶片与金属基板的直径比和厚度比为变量，分析了这种压电振子的结构尺寸匹配对其性能的影响关系，进而对压电振子进行结构优化。结果表明，直径比在0.5～0.8之间、厚度比在0.6～0.8之间的压电振子可获得较好的综合性能：输出功率大、输出力大、位移较大且有效机电耦合系数较高。选取直径比为0.65、厚度比为0.71的压电振子进行实验测试，共振点处中心点唯一最大为23μm，性能较好，表明该结构尺寸匹配正处于理论分析范围内。为膜片式环形压电振子的设计与应用提供了理论依据和技术参考。
• To solve the problem of size matching to diaphragm ring piezoelectric vibrator, we analyzed the diaphragm ring piezoelectric vibrator by Rayleigh energy method and elastic mechanics this way. We supposed the variable is the diameter ratio and thickness ratio of piezoelectric ceramic plate and metal substrate. Then analyzed the relationship between the structural of size matching and the performance of piezoelectric vibrator, and optimized the structure of piezoelectric vibrator. The result shows that there is the better overall performance. That is for the piezoelectric vibrator, there is the larger output power, the large output force, the large displacement and higher effective electromechanical coupling coefficient. When the diameter ratio is between 0.5 and 0.8 and the thickness ratio is between 0.6 and 0.8. Selected the diameter ratio of 0.65 and the thickness ratio of 0.71 to experimental testing. The maximum displacement is 23 microns of the central resonance point are proved by theory analysis. The performance is good and the size matching of this structure is match the range of theoretical analysis. The theoretical approach mentioned in this paper provides theoretical basis and technical reference for the design and application of diaphragm ring piezoelectric vibrator.
• DOI： https://doi.org/10.35534/mr.0101002
• 引用： 田晓超，闻人锴琦，徐安俊，等．膜片式环形压电振子尺寸匹配特性研究［J］. 机械研究，2019，1（1）：20-38.
  https://doi.org/10.35534/mr.0101002